On March 22, the 2026 China Semiconductor Technology International Conference (CSTIC 2026) was held in Shanghai. At the conference, Zhang Dongheyu, a doctoral student enrolled in 2021 in the Department of Electrical Engineering, received the Best Student Paper Award (Second Place) for the paper “Oscillation Mechanisms in Laser-Sustained Plasma Light Sources for Semiconductor Inspection.” The paper focuses on stability regulation of plasma light sources used for wafer defect inspection in semiconductor manufacturing. It presents an in-depth investigation of flow-field oscillation phenomena in laser-sustained plasma, reveals the vortex dynamics mechanisms responsible for inducing oscillations, summarizes the parametric influence patterns governing plasma oscillation frequencies, and proposes methods for transition and regulation of flow-field oscillation modes. The paper was supervised by Fu Yangyang, Associate Professor in the Department of Electrical Engineering.

Zhang Dongheyu (second from right) poses for a group photo with other award recipients and presenters at the conference venue

CSTIC is jointly organized by Semiconductor Equipment and Materials International (SEMI) and the Institute of Electrical and Electronics Engineers (IEEE), and is held concurrently with SEMICON China 2026 in Shanghai. Since its establishment in 2000, the conference has developed into one of the largest and most comprehensive semiconductor technology events in Asia and around the world. Under the theme “What Will Shape the Semiconductor Landscape of the Next Decade,” this year’s conference accepted 543 abstracts covering areas including device engineering, lithography, advanced packaging, AI and IC manufacturing, and other technological directions. Among all submissions, 61% came from industry and 39% from universities and research institutions. Speakers represented 138 leading enterprises, universities, and research institutes worldwide. During the conference, the Best Student Paper Award established by SEMI was presented on site. Following a rigorous review process, Zhang Dongheyu stood out among numerous outstanding applicants and received this honor.

Award Recipient Profile:

Zhang Dongheyu is a doctoral student enrolled in 2021 in the Department of Electrical Engineering under the supervision of Associate Professor Fu Yangyang, with research focusing on laser-sustained plasma. During his doctoral studies, he has published six SCI papers and one EI-indexed paper as first author or co-first author in leading journals in the field, delivered seven oral presentations at international conferences including AAPPS-DPP and IEEE ICOPS, and received honors including the CSTIC 2026 Best Student Paper Award, the PPPS 2025 Best Student Paper Award, the ICPSA 2024 Best Oral Presentation Award, and the AAPPS-DPP 2023 Best Poster Award.